810-099175-011 LamResearch
This document contains detailed information about the LAM RESEARCH 810-099175-011 product and its parameters. Below are the main features of this product:
- [Product name]: LAM RESEARCH 810-099175-011
- [Product type]: Semiconductor processing equipment
- [Product dimensions]: 134 x 108 x 35 in
- [Product weight]: 1,250 lbs
- [Power supply]: 208 VAC, 3-phase, 50/60 Hz
- [Gas delivery system]: 4-channel mass flow controller
- [Chamber size]: 25.5 x 29.5 in
- [Wafer size]: 8 in
Parameters:
Temperature
- [Range]: 20 to 400 °C
- [Control stability]: ± 0.5 °C
- [Uniformity]: ± 2 °C
Pressure
- [Range]: 1 to 100 Torr
- [Control stability]: ± 0.1 Torr
- [Uniformity]: ± 1 Torr
Gas flow
- [Range]: 10 to 1000 sccm
- [Control stability]: ± 1 sccm
- [Uniformity]: ± 10%
RF power
- [Range]: 1 to 3000 W
- [Control stability]: ± 1%
- [Uniformity]: ± 5%
The LAM RESEARCH 810-099175-011 product is designed to provide high-quality semiconductor processing. Its precise control over temperature, pressure, gas flow, and RF power make it an ideal choice for a wide range of applications. If you have any further questions about this product, please contact our customer support team.
